Finite Element Electromagnetic and Mechanical Analysis of Micropump

Abstract- Micropumps are used extensively in biomedical field and are finding its way to other areas. Development in micropumping technology is necessary, in a time where electronics is moving towards the nano scale and its conventional cooling is useless, and where the biomedical science is opting for less insidious surgical procedures and more precise drug delivery methods. In this paper, 3D model of a micro electromagnetic pump was created and its electromagnetic and mechanical analysis was performed. The parts of the conventional micropump were replaced with compatible MEMS materials and analysed. A 3D model of pump’s diaphragm was also created using Ansys and its mechanical analysis was done with the various electromagnetic forces obtained from the electromagnetic analysis. These analysis were done with first the diaphragm material as Polyimide and then as PDMS. Comparisons were also performed with diaphragm deflection corresponding to the various micropump configurations taken.

Keywords- Micropump, electromagnetic, diaphragm, Polyimide, PDMS, AlNiCo

I. INTRODUCTION

Pumps with their dimensions in the micrometer range are called micro pumps. There is a growing interest on these types of pumps due to their potential cost, overall miniaturized size, and improved accuracy in dosing, compared to existing miniature pumps, especially in biomedical field and cooling of microelectronic components. In this paper, a 3D model of micro electromagnetic pump was modeled using Ansoft Maxwell 16.0 software. The electromagnetic force acting on the diaphragm of the pump at various currents was obtained by electromagnetic analysis using the same software. From this analysis, the optimum value of current for maximum force on the diaphragm was obtained. Then, the magnet and diaphragm of micropump were replaced with materials AlNiCo and Polyimide respectively for finding out the performance of these materials in micro pumps. 3D model of the diaphragm is modeled and analyzed using Ansys 15.0 software. Mechanical analysis was also performed by replacing diaphragm material with PDMS. Various diaphragm deflections obtained at different electromagnetic forces were found out and compared to obtain the optimum current for a particular deflection.
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