Performance Evaluation of Embedded Strain Sensing Varying Thickness Polymer Micro-cantilever as Biosensor Platform Abstract – High deflection sensitivity of micro-cantilever is one of the important criteria for cantilever being used as a sensor as well as an actuator. Also resonance frequency of these sensors needs to be higher for biosensing applications. Varying thickness cantilever satisfy these desired criteria as compared to constant thickness micro-cantilever of […]
